A Clustering Technique for Defect Inspection
نویسندگان
چکیده
A system of rules was developed to join disconnected clusters based on the location of the defects for semiconductor defect inspection. The clusters are evaluated on a pair-wise basis using the rules and are joined or not joined based on a threshold. The system continuously re-evaluates the clusters under consideration as the rules change with each joining action. The technique to measure the features and the methods to improve the system speed are developed. The technique proved very effective in field tests for semiconductor inspection applications. Key-Words: Features, rules, defect clustering, semiconductor inspection
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